Hydrogen Depth Profiling by Elastic Recoil Detection

The technique of the hydrogen depth profile determination by proton elastic recoil detection using 4He ion beams with energy 2.0 to 2.5 MeV from the Van de Graaff accelerator is described. The hydrogen concentration profiles are obtained by simulating the experimental proton recoil spectra taking into account the effects of energy straggling and multiple scattering in the target and Al stopper foil and the detector energy resolution. The method is tested using multilayer hydrogen target and Mylar foil and is applied to hydrogen profile determination in H implanted Si crystals. [Russian Text Ignored].