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Atomic Layer Deposition on Soft Materials

Authors :
Gregory N. Parsons
Source :
Atomic Layer Deposition of Nanostructured Materials
Publication Year :
2011
Publisher :
Wiley, 2011.

Details

Database :
OpenAIRE
Journal :
Atomic Layer Deposition of Nanostructured Materials
Accession number :
edsair.doi...........21b6860f778a25e8d1c4f74a1570cd53