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Atomic Layer Deposition on Soft Materials
- Source :
- Atomic Layer Deposition of Nanostructured Materials
- Publication Year :
- 2011
- Publisher :
- Wiley, 2011.
Details
- Database :
- OpenAIRE
- Journal :
- Atomic Layer Deposition of Nanostructured Materials
- Accession number :
- edsair.doi...........21b6860f778a25e8d1c4f74a1570cd53