Design and fabrication of self-packaged, flexible MEMS accelerometer

MLA

Donald P. Butler, et al. “Design and Fabrication of Self-Packaged, Flexible MEMS Accelerometer.” 2015 IEEE SENSORS, Nov. 2015. EBSCOhost, https://doi.org/10.1109/icsens.2015.7370305.

APA

Donald P. Butler, Sohel Mahmood, & Zeynep Celik-Butler. (2015). Design and fabrication of self-packaged, flexible MEMS accelerometer. 2015 IEEE SENSORS. https://doi.org/10.1109/icsens.2015.7370305

Chicago

Donald P. Butler, Sohel Mahmood, and Zeynep Celik-Butler. 2015. “Design and Fabrication of Self-Packaged, Flexible MEMS Accelerometer.” 2015 IEEE SENSORS, November. doi:10.1109/icsens.2015.7370305.