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A Proposed Atomic-Layer-Deposition of Germanium on Si(100)

Authors :
Tomonori Nagai
Yasutaka Uchida
Masakiyo Matsumura
Takuya Kitamura
Satoshi Sugahara
Source :
Extended Abstracts of the 1996 International Conference on Solid State Devices and Materials.
Publication Year :
1996
Publisher :
The Japan Society of Applied Physics, 1996.

Subjects

Subjects :
Atomic layer deposition
Materials science
chemistry
chemistry.chemical_element
Nanotechnology
Germanium

Details

Database :
OpenAIRE
Journal :
Extended Abstracts of the 1996 International Conference on Solid State Devices and Materials
Accession number :
edsair.doi...........203a7de513dbd7eb78cfa1dff5eb9c4e

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