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Micro-channel fabrication on silicon wafer (100) using Rotary Ultrasonic Machining
- Source :
- Silicon. 14:10271-10290
- Publication Year :
- 2022
- Publisher :
- Springer Science and Business Media LLC, 2022.
- Subjects :
- Electronic, Optical and Magnetic Materials
Subjects
Details
- ISSN :
- 18769918 and 1876990X
- Volume :
- 14
- Database :
- OpenAIRE
- Journal :
- Silicon
- Accession number :
- edsair.doi...........1f7111d13ef970f497414b761ceb7848
- Full Text :
- https://doi.org/10.1007/s12633-022-01729-0