Thermal wave studies of thin metal films and structures

Authors :: M. Hovinen
Jon Opsal
H. Chu
J. Ding
Li Chen
A. Rosencwaig
Alex Salnick
Source :: Proceedings of the 10th international conference on photoacoustic and photothermal phenomena.
Publication Year :: 1999
Publisher :: ASCE, 1999.
Abstract: An analysis of a new photothermal system—META-PROBE™ (MP)—capabilities in measuring the thickness and thermal parameters of a single layer metal structures and of multilayer stacks is presented. Examples of MP applications include structures containing Al, Ti, TiN, and SiO2 layers of various thicknesses and processing history.

Subjects :: Thermal conductivity
Materials science
chemistry
Photothermal spectroscopy
Aluminium
Analytical chemistry
chemistry.chemical_element
Tungsten
Composite material
Photothermal therapy
Tin
Thermal diffusivity
Titanium

Database :: OpenAIRE
Journal :: Proceedings of the 10th international conference on photoacoustic and photothermal phenomena
Accession number :: edsair.doi...........1f3a3a0a77226b3704986ea238c98581
Full Text :: https://doi.org/10.1063/1.58084