Fabrication of diffractive optical elements for x-ray range

Problems of microelectronics technology applications for diffractive optical elements fabrication have been considered. The results on x-ray diffractive focusing elements are described: amplitude and phase-contrast Fresnel zone plates as well as freestanding gold gratings. The creation of reflected Bragg-Fresnel lenses for soft x-ray range was made on the basis of multilayer x-ray mirrors. Considerable attention was paid to the correction of different distortion factors involved in the electron beam lithography process.