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The Role of Argon Metastables in an Inductively Coupled Plasma for Treatment of PET

Authors :
Sandra Schröter
Hendrik Bahre
Jörg Winter
Marc Böke
Source :
Plasma Processes and Polymers. 11:239-246
Publication Year :
2014
Publisher :
Wiley, 2014.

Abstract

Metastable states play an important role in many plasmas because they are often one of the main ionization channels and therefore essential for the discharge dynamics. Because of their high population, density fluxes of metastable states on surfaces are not negligible compared to fluxes of reactive species or ions. If the energy of argon metastable states (Arm) is high enough to cause bond breakage or other surface reactions, they can be an alternative component to treat substrates. In view of the role of Arm in an inductively coupled PECVD reactor for the deposition of barrier films on PET, the densities, lifetimes, and fluxes of Arm are quantified by means of tuneable diode laser absorption (TDLAS) and compared to the ion flux.

Details

ISSN :
16128850
Volume :
11
Database :
OpenAIRE
Journal :
Plasma Processes and Polymers
Accession number :
edsair.doi...........1dd70afaaf80cb1fb90372cb020b60c1
Full Text :
https://doi.org/10.1002/ppap.201300138