High-resolution soft X-ray spectroscopy of slow highly charged ions transmitted through a microcapillary target

To detect weak X-rays with a high-resolution spectrometer, a charge-coupled device was operated in a single X-ray photon detection mode. A procedure to effectively identify single X-ray was established. In the case of 2.3 keV/u N7+ and Ne9+ incidence, X-rays emitted from ions transmitted through a Ni microcapillary target were measured with the spectrometer using the procedure of the single event mode. The signal-to-noise ratio was improved by using the single photon counting method.