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41.4: Research on Nano‐grating Equipment with Adjustable Period and Angle
- Source :
- SID Symposium Digest of Technical Papers. 52:509-512
- Publication Year :
- 2021
- Publisher :
- Wiley, 2021.
Details
- ISSN :
- 21680159 and 0097966X
- Volume :
- 52
- Database :
- OpenAIRE
- Journal :
- SID Symposium Digest of Technical Papers
- Accession number :
- edsair.doi...........1db1e1d67ce7db62db246f622bb90cb6
- Full Text :
- https://doi.org/10.1002/sdtp.15180