Highly Sensitive Juntionless Nanowire Transistor Biosensor in Detecting Breast Tumor Marker

Here, we demonstrate a real-time, ultrasensitive junctionless nanowire transistor (JNT) biosensor for breast tumor marker sensing. The proposed JNT biosensor with low-frequency noise, small subthreshold slope and high channel mobility has great potential to solve the key problem of poor signal-to-noise ratio or low sensitivity in current nanobiosensor. The JNT with CMOS-compatibility is made using a (111) silicon-on-insulator (SOi) wafer with a low-cost and top-down fabrication approach. The fabricated device shows excellent electrical properties and high sensitivity for recognizing breast tumor marker (the CEA protein) as low as 1fg/ml.