Improvement of slot antennas for microwave plasma source through electromagnetic analysis

Subjects

Subjects :

010302 applied physics
Materials science
Directional antenna
business.industry
Slot antenna
02 engineering and technology
Plasma
Resonant absorption
021001 nanoscience & nanotechnology
01 natural sciences
Ion source
Optics
Horn antenna
0103 physical sciences
Antenna (radio)
0210 nano-technology
business
Microwave

Details

ISSN :

21879257 and 09194452

Volume :

24

Database :

OpenAIRE

Journal :

Journal of the Japan Society of Applied Electromagnetics and Mechanics

Accession number :

edsair.doi...........1d467ae98cbdb6ee336b572521949b8b

Full Text :

https://doi.org/10.14243/jsaem.24.240