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Non‐damage deep etching of SiC by hybrid laser‐high temperature chemical processing

Authors :
Xi Wang
Bing Han
Martin Ehrhardt
Fengyun Zhang
Jin Wang
Pingping Wang
Peter Pavol Monka
Shufeng Sun
Source :
International Journal of Applied Ceramic Technology. 19:2344-2355
Publication Year :
2022
Publisher :
Wiley, 2022.

Subjects

Subjects :
Marketing
Materials Chemistry
Ceramics and Composites
Condensed Matter Physics

Details

ISSN :
17447402 and 1546542X
Volume :
19
Database :
OpenAIRE
Journal :
International Journal of Applied Ceramic Technology
Accession number :
edsair.doi...........1cef37359fb05ccbf53111523956c73f

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