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A Micro-fabrication Tool for Automatic Large-area Patterning Using Polymer Pen Lithography

Authors :
Mi-Sun Yang
Yongkyun Kim
Jae-Won Jang
Chihong Min
Seung-Hoon Lee
Source :
New Physics: Sae Mulli. 65:615-620
Publication Year :
2015
Publisher :
Korean Physical Society, 2015.

Subjects

Subjects :
chemistry.chemical_classification
Materials science
chemistry
Dip-pen nanolithography
General Physics and Astronomy
Nanotechnology
Micro fabrication
Polymer
Lithography
Maskless lithography

Details

ISSN :
22890041 and 03744914
Volume :
65
Database :
OpenAIRE
Journal :
New Physics: Sae Mulli
Accession number :
edsair.doi...........1cb2b86f12ec964c4f5612d7b988721c
Full Text :
https://doi.org/10.3938/npsm.65.615
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Authors Abstract Subjects Details