Implementation of soft x-ray microscopy with several tens nanometers spatial resolution at NSRL

A transmission soft x-ray microscope (TXM), which is similar to the full-field x-ray microscopes installed on other synchrotron radiation sources in the world, was developed at National Synchrotron Radiation Laboratory (NSRL) in Hefei. An x-ray image taken with the microscope was acquired and its spatial resolution was estimated to be better than 70nm.