Homogeneity in the Microwave Surface Resistance of Large YBa2Cu3O7−δ Superconductor Films Coated with Au

We studied homogeneity in the microwave surface resistance of Au-coated YBa2Cu3O7−δ (Au/YBCO) films. The Au/YBCO film with 4-inches in diameter was prepared in-situ with the thicknesses of 68 nm and 365 nm for the Au layer and the YBa2Cu3O7−δ (YBCO) layer, respectively. We measured the effective surface resistance (RS,eff) of the Au/YBCO film at temperatures of 25 K, 60 K, 70 K, and 77 K, respectively, at 29 different positions on the film. The RS,eff values were analyzed with the finite thicknesses of the Au and the YBCO layers taken into consideration. The local RS,eff values of the Au/YBCO film appeared to be almost uniform at 25 K. Meanwhile significant positional dependences were observed for the RS,eff of the Au/YBCO film at 60 K, 70 K and 77 K, respectively, which seemed to be due to non-uniform local penetration depth (λ) of the YBCO layer rather than due to variations in the local real-part conductivity of the YBCO layer. The observed results could not be attributed to the properties of the Au layer. At temperatures below the critical temperature of YBCO, the observed RS,eff values of the Au/YBCO film were significantly lower than those estimated using the surface resistance of Au and YBCO, which reflected proximity effects of the normal-metal Au layer in contact with the superconducting YBCO layer. Homogeneity in the RS,eff of the Au/YBCO film might be correlated with the distributions in the local λ of the YBCO layer, providing valuable information needed for designing microwave filters.