Plasma diagnostics using electron paramagnetic resonance

Methods giving absolute concentrations of various species in the plasma are of utmost importance to plasma research. Besides currently prevalent laser methods, a method based on microwave absorption—electron paramagnetic resonance—can be successfully used for plasma diagnostics. It is able to detect many atoms, molecules and radicals in the ground or excited states. In this paper we give an overview of the method and several practical examples. (Some figures in this article are in colour only in the electronic version)