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Comprehensive investigation on emitter ledge length of InGaP∕GaAs heterojunction bipolar transistors

Authors :
Shiou Ying Cheng
Po Hsien Lai
Ching Wen Hung
Wen-Chau Liu
Ssu I. Fu
Tzu Pin Chen
Rong Chau Liu
Yan Ying Tsai
Source :
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 25:691
Publication Year :
2007
Publisher :
American Vacuum Society, 2007.

Abstract

The influence of emitter ledge length on the performance of InGaP∕GaAs heterojunction bipolar transistors is comprehensively investigated. Due to the band-bending effect at the intersection of the emitter ledge edge with the exposed base surface, an undesired potential saddle point is formed. Moreover, emitter ledge passivations that are longer or shorter than an optimal length result in the deterioration of device performance. Based on the theoretical analysis and experimental results, the surface recombination effect of the device with an emitter ledge length of 0.8μm is negligible compared with the unpassivated device. Also, the device with the emitter ledge length of 0.8μm shows nearly the best dc characteristics and acceptable rf performance. Therefore, the optimum emitter ledge length in this study is near 0.8μm.

Details

ISSN :
10711023
Volume :
25
Database :
OpenAIRE
Journal :
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Accession number :
edsair.doi...........1b820ba5ddab38bf6a12b608523c5839
Full Text :
https://doi.org/10.1116/1.2723746