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Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes

Authors :
Tiancheng Luo
Qinwen Xu
Zhiwei Wen
Yuanhang Qu
Jie Zhou
Binghui Lin
Yao Cai
Yan Liu
Chengliang Sun
Source :
IEEE Electron Device Letters. 44:574-577
Publication Year :
2023
Publisher :
Institute of Electrical and Electronics Engineers (IEEE), 2023.

Subjects

Subjects :
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Details

ISSN :
15580563 and 07413106
Volume :
44
Database :
OpenAIRE
Journal :
IEEE Electron Device Letters
Accession number :
edsair.doi...........1b75f6fc5eca2783ee6ff777fa565076

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