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An Increase of Threading Dislocations Filtering Efficiency in Al2O3 Templates with Faceted Surface Morphology During a Growth by Molecular Beam Epitaxy
- Source :
- Technical Physics Letters. 46:543-547
- Publication Year :
- 2020
- Publisher :
- Pleiades Publishing Ltd, 2020.
-
Abstract
- We present the results of a transmission electron microscopy and X-ray diffractometry investigation of AlN/c-Al2O3 templates with GaN ultrathin insertions grown by plasma-assisted molecular beam epitaxy. It has been shown that AlN buffer layers with faceted surface morphology provide a greater threading dislocation density reduction than smooth layers. The filtering effect of GaN ultrathin insertions has been confirmed.
- Subjects :
- 010302 applied physics
Threading dislocations
Surface (mathematics)
Materials science
Morphology (linguistics)
Physics and Astronomy (miscellaneous)
business.industry
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Template
Transmission electron microscopy
0103 physical sciences
Threading (manufacturing)
Optoelectronics
Dislocation
0210 nano-technology
business
Molecular beam epitaxy
Subjects
Details
- ISSN :
- 10906533 and 10637850
- Volume :
- 46
- Database :
- OpenAIRE
- Journal :
- Technical Physics Letters
- Accession number :
- edsair.doi...........1a8db7f6d8e57c39c01638ca42fa6fbe