Beam and dielectric materials impact on improvement of the performance of a novel capacitive shunt RF MEMS switch

Subjects

Subjects :

Microelectromechanical systems
Materials science
business.industry
Modeling and Simulation
Capacitive sensing
Optoelectronics
Pull in voltage
Dielectric
Electrical and Electronic Engineering
business
Shunt (electrical)
Computer Science Applications

Details

ISSN :

10991204 and 08943370

Database :

OpenAIRE

Journal :

International Journal of Numerical Modelling: Electronic Networks, Devices and Fields

Accession number :

edsair.doi...........1a7a5c728289e895ab72751c16635f33

Full Text :

https://doi.org/10.1002/jnm.2598