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Optical properties of selective reflection TiNx films

Authors :
Guerman N. Zhizhin
G.I. Grigorov
Krassimira Antonova
V. A. Yakovlev
I.N. Martev
Source :
Thin Solid Films. 219:157-161
Publication Year :
1992
Publisher :
Elsevier BV, 1992.

Abstract

The optical properties and the structure of thin titanium nitride substoichiometric and stoichiometric films were studied as a function of the conditions of film deposition. Optical constants of the non-transparent layers (thickness 2500 A) were determined by both dispersion analysis of the reflectance spectra and surface electromagnetic wave (SEW) phase spectroscopy methods. A new application of the selective reflection properties of the films in radiometry is suggested.

Subjects

Subjects :
Metals and Alloys
Analytical chemistry
Surfaces and Interfaces
Titanium nitride
Electromagnetic radiation
Spectral line
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Condensed Matter::Materials Science
chemistry.chemical_compound
chemistry
Condensed Matter::Superconductivity
Phase (matter)
Dispersion (optics)
Materials Chemistry
Radiometry
Deposition (phase transition)
Stoichiometry

Details

ISSN :
00406090
Volume :
219
Database :
OpenAIRE
Journal :
Thin Solid Films
Accession number :
edsair.doi...........1a48abc512580409b26293fba9a2450f
Full Text :
https://doi.org/10.1016/0040-6090(92)90737-v
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