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Recrystallization process controlled by staircase pulse in phase change memory

Authors :
Ryota Kobayashi
Sumio Hosaka
You Yin
Source :
Microelectronic Engineering. 113:61-65
Publication Year :
2014
Publisher :
Elsevier BV, 2014.

Abstract

In this study, we investigate the recrystallization process in phase-change memory by applying staircase pulses. The controlled recrystallization process is expected to be applied to freely achievable multilevel storage. Simulation results exhibit that the phase change material is heated above its melting point during the first subpulse of the staircase pulse and then annealing temperature can be controlled by varying amplitude of the second subpulse. This implies that the recrystallization region is controllable by applying staircase pulses. V-shaped resistance change vs. the amplitude of the second subpulse, which is caused by the growth and the shrinkage of recrystallized region, is obtained at each width of second subpulse.

Details

ISSN :
01679317
Volume :
113
Database :
OpenAIRE
Journal :
Microelectronic Engineering
Accession number :
edsair.doi...........18ec6c42178c4a38e72c3b57a0dce518
Full Text :
https://doi.org/10.1016/j.mee.2013.07.009