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Effect of negative bias on the composition and structure of the tungsten oxide thin films deposited by magnetron sputtering
- Source :
- Applied Surface Science. 359:521-525
- Publication Year :
- 2015
- Publisher :
- Elsevier BV, 2015.
-
Abstract
- Tungsten oxide thin films were deposited at room temperature under different negative bias voltages (Vb, 0 to −500 V) by DC reactive magnetron sputtering, and then the as-deposited films were annealed at 500 °C in air atmosphere. The crystal structure, surface morphology, chemical composition and transmittance of the tungsten oxide thin films were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), X-ray photoelectron spectroscopy (XPS) and UV–vis spectrophotometer. The XRD analysis reveals that the tungsten oxide films deposited at different negative bias voltages present a partly crystallized amorphous structure. All the films transfer from amorphous to crystalline (monoclinic + hexagonal) after annealing 3 h at 500 °C. Furthermore, the crystallized tungsten oxide films show different preferred orientation. The morphology of the tungsten oxide films deposited at different negative bias voltages is consisted of fine nanoscale grains. The grains grow up and conjunct with each other after annealing. The tungsten oxide films deposited at higher negative bias voltages after annealing show non-uniform special morphology. Substoichiometric tungsten oxide films were formed as evidenced by XPS spectra of W4f and O1s. As a result, semi-transparent films were obtained in the visible range for all films deposited at different negative bias voltages.
- Subjects :
- Tungsten Compounds
Materials science
Scanning electron microscope
Annealing (metallurgy)
Analytical chemistry
General Physics and Astronomy
Surfaces and Interfaces
General Chemistry
Sputter deposition
Condensed Matter Physics
Surfaces, Coatings and Films
Amorphous solid
X-ray photoelectron spectroscopy
Sputtering
Thin film
Subjects
Details
- ISSN :
- 01694332
- Volume :
- 359
- Database :
- OpenAIRE
- Journal :
- Applied Surface Science
- Accession number :
- edsair.doi...........18cc5b8c9680e5833e50b34a388297d5