Implantation, damage, and regrowth of high Tc superconductors

We have observed superconductivity in thin films of (La1−xSrx)2CuOy which are fabricated by implanting evaporated La/Cu multilayer films with Sr and annealing in oxygen. The films are insulating and partially transparent as-implanted, but they darken and become conducting at annealing temperatures as low as 500°C. The resistive behavior is very sensitive to the annealing conditions and the superconducting layer appears to be buried beneath the surface. Similarly, implantation of F, O, and Ne into single crystals and high quality (χmin