Ferroelectric Phase Content in 7 nm Hf (1− x ) Zr x O 2 Thin Films Determined by X‐Ray‐Based Methods

Subjects

Subjects :

Materials science
biology
Analytical chemistry
X-ray
Surfaces and Interfaces
Condensed Matter Physics
Hafnia
biology.organism_classification
Ferroelectricity
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Phase (matter)
Content (measure theory)
Materials Chemistry
Cubic zirconia
Electrical and Electronic Engineering
Thin film

Details

ISSN :

18626319 and 18626300

Volume :

218

Database :

OpenAIRE

Journal :

physica status solidi (a)

Accession number :

edsair.doi...........1762a6c2d9add01c79097511e30aaf49

Full Text :

https://doi.org/10.1002/pssa.202100024