Distribution of Paramagnetic Defects in 3C-SiC Epitaxial Films Grown by LPCVD Method with Alternate Gas Supply

Authors :: E. Hirosawa
Tomio Izumi
Takamitsu Kawahara
K. Kobayashi
Hiroyuki Nagasawa
Source :: Materials Science Forum. :619-622
Publication Year :: 1998
Publisher :: Trans Tech Publications, Ltd., 1998.

Subjects :: Materials science
Distribution (number theory)
business.industry
Carbonization
Mechanical Engineering
Gas supply
Chemical vapor deposition
Condensed Matter Physics
Epitaxy
Paramagnetism
Mechanics of Materials
Electronic engineering
Optoelectronics
General Materials Science
business

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