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In and out of incidence plane Mueller matrix scattering ellipsometry of rough mc-Si

Authors :
Jerome Maria
Morten Kildemo
Lars Martin Sandvik Aas
Source :
Thin Solid Films. 571:399-404
Publication Year :
2014
Publisher :
Elsevier BV, 2014.

Abstract

A partial in and out of incidence plane Mueller matrix scattering ellipsometry (MMSE) experiment is presented, where the Stokes vectors of the scattered light are detected in slightly more than a quarter hemisphere. The MMSE system is briefly reviewed. The Mueller scattering matrix obtained in reflection from as-cut rough solar grade mc-Si surfaces is reported. For the as-cut surface with an estimated correlation length of 4 μm and root mean square roughness of 550 nm, using an illumination wavelength of 532 nm, the degree of polarization is observed to be larger than 0.86, even far away from the incidence plane.

Details

ISSN :
00406090
Volume :
571
Database :
OpenAIRE
Journal :
Thin Solid Films
Accession number :
edsair.doi...........170b8352795940ea7c796a0bbd49086c
Full Text :
https://doi.org/10.1016/j.tsf.2014.04.048