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Finite-element modeling of nanoindentation for evaluating mechanical properties of MEMS materials
- Source :
- Surface and Coatings Technology. :268-275
- Publication Year :
- 1998
- Publisher :
- Elsevier BV, 1998.
-
Abstract
- We have developed procedures based on finite-element modeling of nanoindentation data to extract mechanical properties from thin, hard films and ion-beam-modified layers on softer substrates. The method accurately deduces the yield stress, Young's modulus, and hardness from indentations as deep as 50% of the layer thickness. We use these procedures to evaluate two hard layers potentially useful for reducing friction and wear of components in micro-electromechanical systems (MEMS): Ni implanted with Ti and C, and diamond-like carbon layers. We show that the modeling works well even for materials whose hardness approaches that of diamond, a case where commonly used analytical methods for deducing the modulus fail.
- Subjects :
- Microelectromechanical systems
Materials science
Diamond
Modulus
chemistry.chemical_element
Surfaces and Interfaces
General Chemistry
Nanoindentation
engineering.material
Condensed Matter Physics
Layer thickness
Finite element method
Surfaces, Coatings and Films
chemistry
Materials Chemistry
engineering
Forensic engineering
Composite material
Carbon
Subjects
Details
- ISSN :
- 02578972
- Database :
- OpenAIRE
- Journal :
- Surface and Coatings Technology
- Accession number :
- edsair.doi...........16d988d1a9e94cd13cad7f68d5042a5f