Preparation ofc-axis oriented (Nd, Ce)2CuOythin films by tripolar-type DC magnetron sputtering

Thin films of a superconducting oxide (Nd, Ce)2CuO y , noted as an electron-doped type were prepared on a SrTiO3 (100) substrate by tripolar-type DC magnetron sputtering. Two kind of metals: Nd ‒ Ce alloy and Cu were used as targets to fabricate multimetal films. To make an oxide, two-step oxidation in air was effective, c-axis oriented films were prepared with Tc (onset) = 15 K and a resistivity of 7 m Ω cm, whose value is good enough as an electrode for a ferroelectric thin film.