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411 In-Plane Thermal Conductivity and Electrical Conductivity Measurements of Silicon Thin Film

Authors :
Toru Hiwada
Yosuke Kawahara
Aimi Goto
Koji Miyazaki
Harutoshi Hagino
Source :
The Proceedings of Conference of Kyushu Branch. :139-140
Publication Year :
2012
Publisher :
Japan Society of Mechanical Engineers, 2012.

Details

ISSN :
24242780
Database :
OpenAIRE
Journal :
The Proceedings of Conference of Kyushu Branch
Accession number :
edsair.doi...........168a4eb751fbfb9e6813b850cee79680
Full Text :
https://doi.org/10.1299/jsmekyushu.2012.65.139