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411 In-Plane Thermal Conductivity and Electrical Conductivity Measurements of Silicon Thin Film
- Source :
- The Proceedings of Conference of Kyushu Branch. :139-140
- Publication Year :
- 2012
- Publisher :
- Japan Society of Mechanical Engineers, 2012.
Details
- ISSN :
- 24242780
- Database :
- OpenAIRE
- Journal :
- The Proceedings of Conference of Kyushu Branch
- Accession number :
- edsair.doi...........168a4eb751fbfb9e6813b850cee79680
- Full Text :
- https://doi.org/10.1299/jsmekyushu.2012.65.139