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Effect of Stiffness in Sensitivity Enhancement of MEMS Force Sensor Using Rectangular Spade Cantilever for Micromanipulation Applications

Authors :
Monica Lamba
Kulwant Singh
Himanshu Chaudhary
Source :
Electrical and Electronic Devices, Circuits and Materials
Publication Year :
2021
Publisher :
CRC Press, 2021.

Subjects

Subjects :
Microelectromechanical systems
Materials science
Cantilever
Acoustics
medicine
Stiffness
Sensitivity (control systems)
medicine.symptom
Force sensor

Details

Database :
OpenAIRE
Journal :
Electrical and Electronic Devices, Circuits and Materials
Accession number :
edsair.doi...........16204a80810e20aca7aa7e89d2c6b370
Full Text :
https://doi.org/10.1201/9781003097723-18
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