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The Use of Ozone in Advanced Chip Manufacturing

Authors :
Ozawa Taku
Kenichi Sasaki
Takayuki Saito
Satoro Yoda
Source :
Vakuum in Forschung und Praxis. 14:174
Publication Year :
2002
Publisher :
Wiley, 2002.

Subjects

Subjects :
World Wide Web
Engineering
Thesaurus (information retrieval)
business.industry
Condensed Matter Physics
business
Chip
Surfaces, Coatings and Films

Details

ISSN :
15222454 and 0947076X
Volume :
14
Database :
OpenAIRE
Journal :
Vakuum in Forschung und Praxis
Accession number :
edsair.doi...........15e44f41c3a81b4b371ac180ec966c4e

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Authors Abstract Subjects Details