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Fabrication of Nonvolatile Nano Floating Gate Memory with Self-Assembled Metal-Oxide Nano Particles Embedded in Polyimide
- Source :
- Japanese Journal of Applied Physics. 47:4996-4999
- Publication Year :
- 2008
- Publisher :
- IOP Publishing, 2008.
-
Abstract
- In this article, the nonvolatile nano-floating gate memory (NFGM) device was fabricated with self-assembled metal-oxide nano-particles embedded in a polyimide gate insulator and characterized.
- Subjects :
- Materials science
Fabrication
Physics and Astronomy (miscellaneous)
General Engineering
Oxide
General Physics and Astronomy
Nanoparticle
Nanotechnology
Hardware_PERFORMANCEANDRELIABILITY
Non-volatile memory
chemistry.chemical_compound
Nanoelectronics
chemistry
Hardware_GENERAL
Nano
Hardware_INTEGRATEDCIRCUITS
Self-assembly
Hardware_ARITHMETICANDLOGICSTRUCTURES
Polyimide
Hardware_LOGICDESIGN
Subjects
Details
- ISSN :
- 13474065 and 00214922
- Volume :
- 47
- Database :
- OpenAIRE
- Journal :
- Japanese Journal of Applied Physics
- Accession number :
- edsair.doi...........15a9c1581f4f6ca57079a52263073bef