Sub-wavelength Resolution, Wide Field-Of-View, and Quantitative 13nm Imaging in Reflection and Transmission with a Tabletop High Harmonic Source

Authors :: Giulia F. Mancini
Xiaoshi Zhang
Daniel E. Adams
Henry C. Kapteyn
Dennis F. Gardner
Michael Gerrity
Benjamin R. Galloway
Galen P. Miley
Yuka Esashi
Christina L. Porter
Robert Karl
Elisabeth R. Shanblatt
Charles Bevis
Peter Johnsen
Naoto Horiguchi
Michael Tanksalvala
Margaret M. Murnane
Source :: High-Brightness Sources and Light-driven Interactions.
Publication Year :: 2018
Publisher :: OSA, 2018.
Abstract: We demonstrate high-resolution and wide field-of-view imaging using tabletop 13nm HHG sources in transmission and reflection geometries. Additionally, we present preliminary simulations and results of complex 13nm imaging reflectometry allowing highly-sensitive, non-destructive 3D composition determination.

Subjects :: Physics
Optics
Transmission (telecommunications)
business.industry
Resolution (electron density)
Harmonic
Reflection (physics)
High harmonic generation
Spectral density
Reflectometry
business
Sub wavelength

Tools