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In situ scanning electron microscope observation of hillock and whisker growth on Al–Ta alloy films for interconnections of thin film transistor–liquid crystal displays

Authors :
Eiji Iwamura
Kazuo Yoshikawa
T. Ohnishi
K. Itayama
Source :
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 12:2922-2924
Publication Year :
1994
Publisher :
American Vacuum Society, 1994.

Details

ISSN :
15208559 and 07342101
Volume :
12
Database :
OpenAIRE
Journal :
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Accession number :
edsair.doi...........13ea45e159e71fc4c9a18937f8d663ee
Full Text :
https://doi.org/10.1116/1.578966