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In situ scanning electron microscope observation of hillock and whisker growth on Al–Ta alloy films for interconnections of thin film transistor–liquid crystal displays
- Source :
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 12:2922-2924
- Publication Year :
- 1994
- Publisher :
- American Vacuum Society, 1994.
- Subjects :
- Materials science
Liquid-crystal display
Scanning electron microscope
Whiskers
Metallurgy
Alloy
chemistry.chemical_element
Surfaces and Interfaces
engineering.material
Condensed Matter Physics
Surfaces, Coatings and Films
law.invention
chemistry
Thin-film transistor
Aluminium
Whisker
law
engineering
Composite material
Hillock
Subjects
Details
- ISSN :
- 15208559 and 07342101
- Volume :
- 12
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- Accession number :
- edsair.doi...........13ea45e159e71fc4c9a18937f8d663ee
- Full Text :
- https://doi.org/10.1116/1.578966