Application of Atom Probe Tomography to Nitride Semiconductors

Authors :: G.D.W. Smith
Rachel A. Oliver
S.E. Bennett
Fengzai Tang
Paul A. J. Bagot
Michael P. Moody
Tomas L. Martin
Source :: Microscopy and Microanalysis. 23:666-667
Publication Year :: 2017
Publisher :: Oxford University Press (OUP), 2017.

Subjects :: 010302 applied physics
Materials science
business.industry
Analytical chemistry
02 engineering and technology
Atom probe
021001 nanoscience & nanotechnology
01 natural sciences
law.invention
law
0103 physical sciences
Optoelectronics
0210 nano-technology
business
Nitride semiconductors
Instrumentation

Tools