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Simulation of thin film growth and in situ characterization by RHEED and photoemission

Authors :
M. Djafari Rouhani
N. Fazouan
Anne-Marie Gué
Daniel Esteve
Source :
Vacuum. 46:931-934
Publication Year :
1995
Publisher :
Elsevier BV, 1995.

Abstract

Simulations of epitaxial growth of GaAs associated with RHEED intensity and photoemission current, as in situ characterization techniques, have been performed. The nature of incoming species which can be of atomic or molecular form is taken into account. The simulations show in phase RHEED and photoemission oscillations, in agreement with experimental results.

Details

ISSN :
0042207X
Volume :
46
Database :
OpenAIRE
Journal :
Vacuum
Accession number :
edsair.doi...........12dfc63a6d9c672f35d373764987f9ea
Full Text :
https://doi.org/10.1016/0042-207x(95)00075-5