Effect of the Substrate Nature on the ALD ZrO2 Films Crystalline Structure

Authors :: Denis Monnier
Mickael Gros-Jean
Emilie Deloffre
Béatrice Doisneau
Stéphane Coindeau
Alexandre Crisci
Jérôme Roy
Yanyu Mi
Blanka Detlefs
Jorg Zegenhagen
Christophe Wyon
Christine Martinet
Fabien Volpi
Elisabeth Blanquet
Source :: ECS Meeting Abstracts. :2528-2528
Publication Year :: 2009
Publisher :: The Electrochemical Society, 2009.
Abstract: not Available.

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