Al0.35Ga0.65N pin diodes exhibiting sub-fA leakage currents

Using conventional photolithography, Al 0.35 Ga 0.65 N pin diodes have been fabricated that exhibit extremely low reverse bias leakage currents. Macroscopic I-V measurements from a statistical population of 64, 120 μm diameter, circular diodes gives a mean leakage current of 0.96 fA with a standard deviation of 0.90 fA at -0.5 V bias.