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Planar Reactive Magnetron Sputtering to Obtain Dielectrics and Transparent Conductive Thin Films

Authors :
Marina Kipiani
Source :
International Journal of New Technology and Research. 6
Publication Year :
2020
Publisher :
Nextgen Research Publications, 2020.

Subjects

Subjects :
Reactive magnetron
Planar
Materials science
business.industry
Sputtering
Optoelectronics
Dielectric
Thin film
business
Electrical conductor

Details

ISSN :
24544116
Volume :
6
Database :
OpenAIRE
Journal :
International Journal of New Technology and Research
Accession number :
edsair.doi...........11504a40023c4d6b48e2716d3978d9aa

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