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Research on interferometric inspection of surface topography of ring elements

Authors :
Jun Cheng
Sen Han
Xiaoyue Bian
Xianyu Wu
Xianhao Qi
Linghua Zhang
Qiang Cheng
Source :
Optical Metrology and Inspection for Industrial Applications IX.
Publication Year :
2022
Publisher :
SPIE, 2022.

Details

Database :
OpenAIRE
Journal :
Optical Metrology and Inspection for Industrial Applications IX
Accession number :
edsair.doi...........1124da09ac4297c218c469eca6904040

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