LOW-POWER SILICON MICROHEATERS ON A THIN DIELECTRIC MEMBRANE WITH THICK-FILM SENSING LAYER FOR GAS SENSOR APPLICATIONS

Authors :: Marco Stefancich
Alexei Vasiliev
Maria Cristina Carotta
Flavio Giacomozzi
A. V. Pisliakov
Benno Margesin
Maria Angela Butturi
G. Soncini
S. Brida
Donato Vincenzi
Mario Zen
G. Pignatel
V. Guarnieri
Giuliano Martinelli
Source :: Microelectronics, Microsystems and Nanotechnology.
Publication Year :: 2001
Publisher :: WORLD SCIENTIFIC, 2001.

Subjects :: Materials science
Silicon
chemistry
Dielectric membrane
business.industry
Optoelectronics
chemistry.chemical_element
business
Layer (electronics)
Power (physics)

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