Thermally stable micro hot wire sensor with borofloat glass membrane

MLA

Yang-Rye Lim, et al. “Thermally Stable Micro Hot Wire Sensor with Borofloat Glass Membrane.” The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS ’05, Aug. 2005. EBSCOhost, https://doi.org/10.1109/sensor.2005.1497469.

APA

Yang-Rye Lim, Sang-Mun Lee, Jung-II Bang, Yun-Su Lee, Takashi Oyabu, Duk-Dong Lee, Byung-Su Joo, Kap-Duk Song, & Sang-Rok Lee. (2005). Thermally stable micro hot wire sensor with borofloat glass membrane. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS ’05. https://doi.org/10.1109/sensor.2005.1497469

Chicago

Yang-Rye Lim, Sang-Mun Lee, Jung-II Bang, Yun-Su Lee, Takashi Oyabu, Duk-Dong Lee, Byung-Su Joo, Kap-Duk Song, and Sang-Rok Lee. 2005. “Thermally Stable Micro Hot Wire Sensor with Borofloat Glass Membrane.” The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS ’05, August. doi:10.1109/sensor.2005.1497469.