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Preparations of ITO Thin Films by Low Temperature and Low Damage Process

Authors :
Soichi Ogawa
Yoshihiko Ueda
Masaaki Nishikawa
Takayuki Haraguchi
Source :
SHINKU. 47:187-190
Publication Year :
2004
Publisher :
The Vacuum Society of Japan, 2004.

Subjects

Subjects :
Materials science
Scientific method
Electrical and Electronic Engineering
Thin film
Composite material
Condensed Matter Physics
Surfaces, Coatings and Films

Details

ISSN :
18809413 and 05598516
Volume :
47
Database :
OpenAIRE
Journal :
SHINKU
Accession number :
edsair.doi...........10374d5934ae36252530b0c8b637a061
Full Text :
https://doi.org/10.3131/jvsj.47.187
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