Stencil lithography for bridging MEMS and NEMS

Subjects

Subjects :

Electrical and Electronic Engineering
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

Details

ISSN :

25900072

Volume :

19

Database :

OpenAIRE

Journal :

Micro and Nano Engineering

Accession number :

edsair.doi...........100c5089859540ac2564cf2b9bd74121

Full Text :

https://doi.org/10.1016/j.mne.2023.100206