High-Energy X-ray Microprobe by Multilayer Zone Plate and Microscopy at SPring-8

Microfocusing experiments of high‐brilliance, high‐energy X‐ray by using a multilayer Fresnel zone plates were performed at SPring‐8. It is proved that the multilayer FZPs can be used as focusing elements with high spatial resolution in a wide range X‐ray wavelength domain up to 100 keV. A Cu/Al FZP with the thickness of 40 micron has attained the spatial resolution of 0.7 ∼ 1.8 micron in a wide range X‐ray wavelength domain of 18.6 ∼ 113 keV. Three types of microscopic image of an Au mesh with 1500 lines per inch were taken by a X‐ray microscopy experiment by using the multilayer FZP at 82 keV: a scanning microscopic transmission image, a scanning microscopic fluorescent one and an imaging microscopic one with the spatial resolution of ∼ 0.7 micron. High‐energy X‐ray microprobe by using the multilayer FZP will be powerful tool for non‐destructive various analyses of thick materials (bulk, IC, etc) with submicron spatial resolution.