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Using Etch Well to Suppress Edge Breakdown of Planar-type InGaAs/InP Geiger Mode Avalanche Photodiodes
- Source :
- ACTA PHOTONICA SINICA. 47:523001
- Publication Year :
- 2018
- Publisher :
- Shanghai Institute of Optics and Fine Mechanics, 2018.
Details
- ISSN :
- 10044213
- Volume :
- 47
- Database :
- OpenAIRE
- Journal :
- ACTA PHOTONICA SINICA
- Accession number :
- edsair.doi...........0f00953c80796f25d61409a9a3826dc1