Technology development for blue, green, and red microLED displays (Conference Presentation)

Technology development of blue, green and red light micro LED display (uD) was developed in this study. Here, 64 x 32 pixels on the display, with size of 50 μm x 50 μm and pixel pitch of 100 μm were demonstrated. ITO as transparent conducting layer on the P-epilayer is used to be contact layer and contributes current spreading. Flip chip LED process as basic of process design is apply to this study, light is emitted from the back side of LED that it can prevent light emitting that is shaded from metal. Ti/Al/Ti/Au as electrode was deposited on the anode and cathode. Display was boned to IC by anisotropic conductive film, the process of display was finished eventually. Single pixel on matrix display can be driven by mix multi-electrodes addressable controlling circuit with passive IC, the image is demonstrated on the display successfully. The 430, 590 and 600 nit for blue, green and red uDs were obtained as the uDs were driven by PWM with voltage source at 5 V.