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Observation of micro-characters using three-dimensional shape measurement method based on speckle interferometry
- Source :
- Journal of Modern Optics. 67:1451-1461
- Publication Year :
- 2020
- Publisher :
- Informa UK Limited, 2020.
-
Abstract
- Speckle interferometry has long been used to measure the deformation of an object with a rough surface. Currently, it can be used to measure the shape of a three-dimensional microstructure by inten...
- Subjects :
- Measurement method
Materials science
business.industry
Measure (physics)
Deformation (meteorology)
Object (computer science)
01 natural sciences
Atomic and Molecular Physics, and Optics
010309 optics
Three dimensional shape
Optics
Rough surface
0103 physical sciences
Speckle imaging
010306 general physics
business
Image resolution
Subjects
Details
- ISSN :
- 13623044 and 09500340
- Volume :
- 67
- Database :
- OpenAIRE
- Journal :
- Journal of Modern Optics
- Accession number :
- edsair.doi...........0ea382297c2396c208e3c5ddc4a9c81b